This highly accurate process directs a high-energy charged-particle beam at the sample to ‘excite’ the electrons at an atomic level and cause energy to be released in the form of x-rays. The x-ray discharge is analyzed to accurately study the elemental composition of the specimen.

EDX is used in conjunction with the Scanning Electron Microscope (SEM). This approach is an effective method in analyzing ‘failure specimens’ for contamination as a cause of failure. Defects and contaminations identified using EDX analysis provide clients with the information needed to focus on problem areas in the manufacturing process and improve quality.